Micro Type Thermal Mass Flow Meter

Key Features

1. High Precision and Accuracy: Micro type thermal mass flow meters offer high precision and accuracy, often with a flow measurement error margin of less than ±1%. This level of accuracy is crucial for applications where precise gas flow measurement is necessary.

2. Wide Range of Flow Rates: These meters can measure very low to very high flow rates, making them versatile for different applications. The ability to measure low flow rates accurately is particularly beneficial in processes that require meticulous gas dosing.

3. Minimal Pressure Drop: One of the advantages of thermal mass flow meters is their minimal impact on the flow system. They introduce a negligible pressure drop, which is important for maintaining system efficiency and ensuring consistent process conditions.

4. Direct Mass Flow Measurement: Unlike other flow meters that measure volumetric flow and require additional calculations to determine mass flow, thermal mass flow meters provide direct mass flow readings. This simplifies the process and reduces the potential for errors associated with conversion calculations.

Applications

1. Industrial Gas Flow Monitoring: In industries such as chemical processing and petroleum refining, precise measurement of gas flow is essential for process control and safety. Thermal mass flow meters provide accurate data that helps in maintaining optimal conditions and preventing hazardous situations.

2. Environmental Monitoring: These devices are used in monitoring air quality and emissions. Their ability to measure low flow rates accurately is vital for detecting and quantifying trace levels of pollutants in the environment.

3. Semiconductor Manufacturing: In the production of semiconductors, precise gas flow control is necessary for processes like chemical vapor deposition and etching. Thermal mass flow meters ensure that the correct amount of gas is delivered, thereby improving the quality and yield of semiconductor products.